PQ Check Standard, Bi-Mix Verification Standard for CMP Applications

PQ Check Standard, Bi-Mix Verification Standard for CMP Applications

• Designed specifically as a bi-modal PQ check standard for Chemical-Mechanical Planarization (CMP) slurry monitoring applications to verify proper operation of the Particle Sizing Systems (PSS) Model 780 Accusizer™ SPOS instrument used in the Autodiluter / APS configuration.
• Volume: 125 mL
• Standard material: NIST traceable size Polystyrene latex (PSL) spheres
• Nominal sizes and concentrations of standard particles:
  • 56 µm PSL – 1,500,000 particles/mL
  • 0 µm PSL – 1,500,000 particles/mL
  • Product batch will be ± 10% of the nominal concentration; individual standard bottles will be certified ± 22% of the mean concentration and particle sizes are certified ± 5% of the standard size (± uncertainty)

The Certificate of Conformance includes actual concentration testing data and mean size