Calibration Kit for SPOS Instrument in CMP Application

Calibration Kit for SPOS Instrument in CMP Application

Designed to make Accusizer™ LE400 SPOS particle sensor calibration easy, this standard kit contains thirteen different sizes of polystyrene latex (PSL) sphere particles required for calibration of a Single Particle Optical Sensing (SPOS) particle size analyzer.  Each kit is packaged in a hard-sided plastic case designed to protect the vials for safe, easy transport and storage by field service personnel.

• Volume: 5ml of each standard
• Standard material: NIST traceable size Polystyrene latex (PSL) spheres
• Nominal sizes:
  • 5 µm
  • 6 µm
  • 7 µm
  • 9 µm
  • 3 µm
  • 0 µm
  • 0 µm
  • 0 µm
  • 0 µm
  • 100 µm

The Certificate of Conformance includes actual concentration testing data and mean size