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Calibration Kit for SPOS Instrument in CMP Application
Calibration Kit for SPOS Instrument in CMP Application
Designed to make Accusizer™ LE400 SPOS particle sensor calibration easy, this standard kit contains thirteen different sizes of polystyrene latex (PSL) sphere particles required for calibration of a Single Particle Optical Sensing (SPOS) particle size analyzer. Each kit is packaged in a hard-sided plastic case designed to protect the vials for safe, easy transport and storage by field service personnel.
- Volume: 5ml of each standard
- Standard material: NIST traceable size Polystyrene latex (PSL) spheres
- Nominal sizes:
- 5 µm
- 6 µm
- 7 µm
- 9 µm
- 3 µm
- 0 µm
- 0 µm
- 0 µm
- 0 µm
- 100 µm
The Certificate of Conformance includes actual concentration testing data and mean size