PQ Check standard; Bi-Mix Verification Standard; CMP application

061NA

Calibration Kit vial for SPOS Instrument in CMP Application: Bi-Mix Verification Standard

Designed specifically as a bi-modal PQ check standard for Chemical-Mechanical Planarization (CMP) slurry monitoring applications to verify proper operation of the Particle Sizing Systems (PSS) Model 780 Accusizer™ SPOS instrument used in the Auto-diluter / APS configuration.

• Volume: 5ml
• Standard material: NIST traceable size Polystyrene latex (PSL) spheres
• Nominal sizes and concentrations:
  • Approximately 1.5×106 particles/mL of 0.56 µm PSL
  • Approximately 1.5×106 particles/mL of 1.0 µm PSL
  • Product batch will be ± 10% of the nominal concentration; individual standard bottles will be certified ± 22% of the mean concentration and particle sizes are certified ± 5% of the standard size (± uncertainty)
• The Certificate of Analysis includes actual concentration testing data and mean size