PQ Check Standard, Bi-Mix Verification Standard for CMP Applications

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PQ Check Standard, Bi-Mix Verification Standard for CMP Applications

  • Designed specifically as a bi-modal PQ check standard for Chemical-Mechanical Planarization (CMP) slurry monitoring applications to verify proper operation of the Particle Sizing Systems (PSS) Model 780 Accusizer™ SPOS instrument used in the Autodiluter / APS configuration.
  • Volume: 125 mL
  • Standard material: NIST traceable size Polystyrene latex (PSL) spheres
  • Nominal sizes and concentrations of standard particles:
    • 0.56 µm PSL – 1,500,000 particles/mL
    • 1.0 µm PSL – 1,500,000 particles/mL
    • Product batch will be ± 10% of the nominal concentration; individual standard bottles will be certified ± 22% of the mean concentration and particle sizes are certified ± 5% of the standard size (± uncertainty)
  • The Certificate of Analysis includes actual concentration testing data and mean size
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